We Can Figure This Out.org
Virtual Lab: Minilab ? Lithography
University of Virginia
             
 
© 2003-Present, John C. Bean
 
The vacuum maintains the wafers? position on the vacuum chuck during rotation. The spinner has been preset to run at 3000 RPM using a tachometer. The rotation creates a strong centripetal force that causes the HMDS film to spread out to form a uniform coating indicated by the color change in the film. Note the spinner control switch at the right.
 
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