We Can Figure This Out.org
Virtual Lab: EUV Lithography
University of Virginia
             
 
© 2003-Present, John C. Bean
 
This video show the complete extreme ultraviolet (EUV) lithography process:

Laser excites a plasma to create very short wavelength light

Light is superimposed into one beam

EUV light beam is projected onto the "mask."

Light is bounced off mirrors to reduce the size of the image

Pattern is scanned across the wafer