We Can Figure This Out.org
Virtual Lab: EUV Lithography
University of Virginia
             
 
© 2003-Present, John C. Bean
 
The laser beam is directed at a jet of Xenon Gas.

This gas heats up, creating a plasma which radiates ultraviolet light of 13 nm wavelength.

An assembly of six silicon mirrors (C1), collects the scattered light, and concentrates the light into arc shaped illumination patterns.

 
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